High inductance coil embedded on magnetic sensor chip for biomagnetic signal measurements

For the purpose of biomagnetic measurements, a magnetic sensor chip is manufactured using a 0.18 μm complementary metal-oxide-semiconductor (CMOS) process. A high-inductance coil and an instrumentation amplifier (IA) are embedded on this chip. The embedded high-inductance coil sensor contains suitable sensitivity and bandwidth for biomagnetic measurements, and is designed via electromagnetic field simulation. A low-g_m operational transconductance amplifier (OTA) is also implemented on the chip to reduce the transconductance value. The output signal sensitivity of the magnetic sensor chip is 3.25 fT/μV, and the output reference noise is $21.1\,{\rm fT}/\sqrt{\rm Hz}. The instrumentation amplifier is designed to minimize the magnetic signal noise using current feedback and a band-pass filter (BPF) with a bandwidth between 0.5 kHz and 5 kHz. The common-mode rejection ratio (CMRR) is measured at 117.5 dB by the Multi-Project Chip test. The proposed magnetic sensor chip is designed such that the input reference noise is maintained below 0.87 μV.