H2S-sensing properties of Cu2O submicron-sized rods and trees synthesized by radio-frequency magnetron sputtering

Vu Xuan Hien; Jae Lok You; Kwang Min Jo; Se Yun Kim; Joon Hyung Lee; Jeong Joo Kim; Young Woo Heo

doi:10.1016/j.snb.2014.05.070

H₂S-sensing properties of Cu₂O submicron-sized rods and trees synthesized by radio-frequency magnetron sputtering

Vu Xuan Hien, Jae Lok You, Kwang Min Jo, Se Yun Kim, Joon Hyung Lee, Jeong Joo Kim, Young Woo Heo

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

Cuprous oxide is a famous p-type material which possesses a great potential in the gas sensing applications. In this paper, thin films and submicron-sized rods and trees of Cu₂O were deposited on glass substrates from metallic Cu targets by tailoring the Ar/O₂ ratio during the sputtering process. The obtained samples are used to fabricate gas sensors. The H₂S-sensing properties of the sensors at working temperatures from 100 °C to 300 °C are studied, in which the Cu₂O tree-like sensor performed the best sensitivity comparing with the rest samples. A transformation from Cu₂O to CuS is considered as the sensing mechanism of the sensors. Finally, influences of the morphologies onto the sensing properties are analyzed and compared.

Original language	English
Pages (from-to)	330-338
Number of pages	9
Journal	Sensors and Actuators, B: Chemical
Volume	202
DOIs	https://doi.org/10.1016/j.snb.2014.05.070
State	Published - 31 Oct 2014

Keywords

Gas sensor
Microstructure
Morphology
Oxide-film constitution
Sputtering

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title = "H2S-sensing properties of Cu2O submicron-sized rods and trees synthesized by radio-frequency magnetron sputtering",

abstract = "Cuprous oxide is a famous p-type material which possesses a great potential in the gas sensing applications. In this paper, thin films and submicron-sized rods and trees of Cu2O were deposited on glass substrates from metallic Cu targets by tailoring the Ar/O2 ratio during the sputtering process. The obtained samples are used to fabricate gas sensors. The H2S-sensing properties of the sensors at working temperatures from 100 °C to 300 °C are studied, in which the Cu2O tree-like sensor performed the best sensitivity comparing with the rest samples. A transformation from Cu2O to CuS is considered as the sensing mechanism of the sensors. Finally, influences of the morphologies onto the sensing properties are analyzed and compared.",

keywords = "Gas sensor, Microstructure, Morphology, Oxide-film constitution, Sputtering",

author = "Hien, {Vu Xuan} and You, {Jae Lok} and Jo, {Kwang Min} and Kim, {Se Yun} and Lee, {Joon Hyung} and Kim, {Jeong Joo} and Heo, {Young Woo}",

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AU - Hien, Vu Xuan

AU - You, Jae Lok

AU - Jo, Kwang Min

AU - Kim, Se Yun

AU - Lee, Joon Hyung

AU - Kim, Jeong Joo

AU - Heo, Young Woo

PY - 2014/10/31

Y1 - 2014/10/31

N2 - Cuprous oxide is a famous p-type material which possesses a great potential in the gas sensing applications. In this paper, thin films and submicron-sized rods and trees of Cu2O were deposited on glass substrates from metallic Cu targets by tailoring the Ar/O2 ratio during the sputtering process. The obtained samples are used to fabricate gas sensors. The H2S-sensing properties of the sensors at working temperatures from 100 °C to 300 °C are studied, in which the Cu2O tree-like sensor performed the best sensitivity comparing with the rest samples. A transformation from Cu2O to CuS is considered as the sensing mechanism of the sensors. Finally, influences of the morphologies onto the sensing properties are analyzed and compared.

AB - Cuprous oxide is a famous p-type material which possesses a great potential in the gas sensing applications. In this paper, thin films and submicron-sized rods and trees of Cu2O were deposited on glass substrates from metallic Cu targets by tailoring the Ar/O2 ratio during the sputtering process. The obtained samples are used to fabricate gas sensors. The H2S-sensing properties of the sensors at working temperatures from 100 °C to 300 °C are studied, in which the Cu2O tree-like sensor performed the best sensitivity comparing with the rest samples. A transformation from Cu2O to CuS is considered as the sensing mechanism of the sensors. Finally, influences of the morphologies onto the sensing properties are analyzed and compared.

KW - Gas sensor

KW - Microstructure

KW - Morphology

KW - Oxide-film constitution

KW - Sputtering

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H₂S-sensing properties of Cu₂O submicron-sized rods and trees synthesized by radio-frequency magnetron sputtering

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Keywords

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