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Hydrogen incorporation and diffusivity in plasma-exposed bulk ZnO

  • K. Ip
  • , M. E. Overberg
  • , Y. W. Heo
  • , D. P. Norton
  • , S. J. Pearton
  • , C. E. Stutz
  • , B. Luo
  • , F. Ren
  • , D. C. Look
  • , J. M. Zavada
  • University of Florida
  • Air Force Research Laboratory
  • Wright State University
  • United States Army Research Office

Research output: Contribution to journalArticlepeer-review

217 Scopus citations

Abstract

Diffusion of hydrogen in zinc oxide was investigated during exposure to 2H plasmas. Optical properties were measured using photoluminescence spectroscopy at variable temperatures, with a He-Cd laser as the excitation source. Hydrogen was found to exhibit a very rapid diffusion in ZnO when incorporated by plasma exposure, with an estimated value for D of 8.7×10-10 cm2/VS at 300 °C. The activation energy for diffusion was indicative of interstitial motion.

Original languageEnglish
Pages (from-to)385-387
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number3
DOIs
StatePublished - 20 Jan 2003

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