Hydrogen plasma treatment effects on electrical and optical properties of n-ZnO

A. Y. Polyakov; N. B. Smirnov; A. V. Govorkov; K. Ip; M. E. Overberg; Y. W. Heo; D. P. Norton; S. J. Pearton; B. Luo; F. Ren; J. M. Zavada

doi:10.1063/1.1579114

Hydrogen plasma treatment effects on electrical and optical properties of n-ZnO

A. Y. Polyakov, N. B. Smirnov, A. V. Govorkov, K. Ip, M. E. Overberg, Y. W. Heo, D. P. Norton, S. J. Pearton, B. Luo, F. Ren, J. M. Zavada

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Abstract

The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.

Original language	English
Pages (from-to)	400-406
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	1
DOIs	https://doi.org/10.1063/1.1579114
State	Published - 1 Jul 2003

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abstract = "The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.",

author = "Polyakov, \{A. Y.\} and Smirnov, \{N. B.\} and Govorkov, \{A. V.\} and K. Ip and Overberg, \{M. E.\} and Heo, \{Y. W.\} and Norton, \{D. P.\} and Pearton, \{S. J.\} and B. Luo and F. Ren and Zavada, \{J. M.\}",

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AU - Polyakov, A. Y.

AU - Smirnov, N. B.

AU - Govorkov, A. V.

AU - Ip, K.

AU - Overberg, M. E.

AU - Heo, Y. W.

AU - Norton, D. P.

AU - Pearton, S. J.

AU - Luo, B.

AU - Ren, F.

AU - Zavada, J. M.

PY - 2003/7/1

Y1 - 2003/7/1

N2 - The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.

AB - The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.

UR - https://www.scopus.com/pages/publications/0042706766

U2 - 10.1063/1.1579114

DO - 10.1063/1.1579114

M3 - Article

AN - SCOPUS:0042706766

SN - 0021-8979

VL - 94

SP - 400

EP - 406

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

Hydrogen plasma treatment effects on electrical and optical properties of n-ZnO

Abstract

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