Hydrogen plasma treatment effects on electrical and optical properties of n-ZnO

A. Y. Polyakov; N. B. Smirnov; A. V. Govorkov; K. Ip; M. E. Overberg; Y. W. Heo; D. P. Norton; S. J. Pearton; B. Luo; F. Ren; J. M. Zavada

doi:10.1063/1.1579114

Hydrogen plasma treatment effects on electrical and optical properties of n-ZnO

A. Y. Polyakov
, N. B. Smirnov
, A. V. Govorkov
, K. Ip
, M. E. Overberg
, Y. W. Heo
, D. P. Norton
, S. J. Pearton
, B. Luo
, F. Ren
, J. M. Zavada

Institute of Rare Metals
University of Florida
United States Army Research Office

Research output: Contribution to journal › Article › peer-review

61 Scopus citations

Abstract

The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.

Original language	English
Pages (from-to)	400-406
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	1
DOIs	https://doi.org/10.1063/1.1579114
State	Published - 1 Jul 2003

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abstract = "The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.",

author = "Polyakov, \{A. Y.\} and Smirnov, \{N. B.\} and Govorkov, \{A. V.\} and K. Ip and Overberg, \{M. E.\} and Heo, \{Y. W.\} and Norton, \{D. P.\} and Pearton, \{S. J.\} and B. Luo and F. Ren and Zavada, \{J. M.\}",

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AU - Polyakov, A. Y.

AU - Smirnov, N. B.

AU - Govorkov, A. V.

AU - Ip, K.

AU - Overberg, M. E.

AU - Heo, Y. W.

AU - Norton, D. P.

AU - Pearton, S. J.

AU - Luo, B.

AU - Ren, F.

AU - Zavada, J. M.

PY - 2003/7/1

Y1 - 2003/7/1

N2 - The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.

AB - The hydrogen plasma treatment effects on electrical and optical properties of n-ZnO were studied. The spectrum was dominated by two peaks corresponding to electron traps with apparent activation energies of 0.2 and 0.3 eV. The luminescence intensity in the near band-edge region was shown to increase down to the depth corresponding to the hydrogen penetration depth in the material.

UR - https://www.scopus.com/pages/publications/0042706766

U2 - 10.1063/1.1579114

DO - 10.1063/1.1579114

M3 - Article

AN - SCOPUS:0042706766

SN - 0021-8979

VL - 94

SP - 400

EP - 406

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

Hydrogen plasma treatment effects on electrical and optical properties of n-ZnO

Abstract

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