Impact of in situ atomic layer deposition TiN/high-κ stack onto In0.53Ga0.47As MOSCAPs on 300 mm Si substrate

Jun Gyu Kim, Hyuk Min Kwon, Dae Hyun Kim, Tae Woo Kim

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Impact of in situ atomic layer deposition TiN/high-κ stack onto In0.53Ga0.47As MOSCAPs on 300 mm Si substrate'. Together they form a unique fingerprint.

Material Science