Improvement in bias stability of amorphous- InGaZn O4 thin film transistors with Si Ox passivation layers

Wantae Lim, E. A. Douglas, D. P. Norton, S. J. Pearton, F. Ren, Young Woo Heo, S. Y. Son, J. H. Yuh

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40 Scopus citations

Abstract

The authors investigated the effect of Si Ox passivation layers on the bias stability of bottom gate amorphous (α) InGaZn O4 thin film transistors (TFTs) fabricated on glass substrates. The use of rapid thermal annealing for unpassivated TFTs in air improved the device performance, showing larger drain current and field effect mobility compared to the as-fabricated TFTs. Threshold voltage (VTH) and subthreshold gate-voltage swing (S) for both unpassivated and passivated devices were found to be nearly independent of the low-gate-voltage stress (5 V), but both were strongly affected under a relatively high-voltage stress (>10 V). The positive VTH and S shifts after constant gate voltage stress (+20 V) of 1000 s were 1.8 V and 0.72 V decade-1 for the unpassivated devices and 1 V and 0.42 V decade-1 for the passivated devices, respectively. These results demonstrate that the Si Ox passivation layer significantly reduced the shift in TFT's characteristics.

Original languageEnglish
Pages (from-to)116-119
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume28
Issue number1
DOIs
StatePublished - 2010

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