Abstract
After the Cu coating layer was fabricated, the high energy beam was irradiated and the mechanical properties of the Cu coating layer before and after irradiation were compared. As the high energy beam is irradiated onto the material of the coating layer, the dipole of the polar material rotates, and the coating layer is heated due to the intermolecular friction, thereby resulting in a heat treatment effect even in a short time. Scanning electron microscopy analysis confirmed that the surface structure was changed, and X-ray diffraction and X-ray photoelectron spectroscopy were used to confirm the crystallinity and bonding state from Cu to CuO. In addition, in the nanoindentation analysis, all improved mechanical properties were observed for martens hardness, indentation hardness and indentation modulus. It is clear that this method will be widely used in various fields in the near future to change the surface layer phase to improve mechanical properties.
Original language | English |
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Article number | 138110 |
Journal | Thin Solid Films |
Volume | 709 |
DOIs | |
State | Published - 1 Sep 2020 |
Keywords
- Copper
- High energy irradiation
- Mechanical properties
- Microwave heating
- Nanoindentation
- Sputtering
- Thin film