Improving space bandwidth product of reflective digital holographic microscopy by the use of Fourier-ptychographic illumination technique

Yongjun Lim, Kwan Jung Oh, Minwoo Jung, Joonku Hahn

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Digital holographic microscopy has been widely adopted in the field of biology because of its ability of quantifying phase information. Unlike those conventional transmission-type phase imaging techniques, reflective digital holographic microscopy can be applied in the field of display industry or semiconductor industry for inspecting unwanted defects in a certain fabrication process. Consequently, it is necessary and required to achieve large field of view and resolution enhancement to meet the demands on the fast and accurate shape measurement. To increase the minimum resolution, we are going to adopt programmable illumination patterns by the use of fast-activating digital micro-mirror devices (DMDs) referring to Fourier ptychographic illumination. In this work, to expand space bandwidth product in reflection-type digital holographic microscopy (RDHM) configuration, we apply a fast-activating digital micro-mirror device for a amplitude-type spatial light modulator and a micro-lens array in the reference arm of a conventional RDHM.

Original languageEnglish
Title of host publicationComputational Imaging VII
EditorsJonathan C. Petruccelli, Chrysanthe Preza
PublisherSPIE
ISBN (Electronic)9781510661608
DOIs
StatePublished - 2023
EventComputational Imaging VII 2023 - Orlando, United States
Duration: 1 May 20232 May 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12523
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceComputational Imaging VII 2023
Country/TerritoryUnited States
CityOrlando
Period1/05/232/05/23

Keywords

  • Digital holographic microscopy
  • Fourier-ptychographic illumination
  • Space bandwidth product

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