Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO2 films

Honghwi Park; Jaedong Jung; Mingyuan Liu; Sunghwan Lee; Hongsik Park

doi:10.1149/10202.0151ecst

Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO₂ films

Honghwi Park, Jaedong Jung, Mingyuan Liu, Sunghwan Lee, Hongsik Park

School of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this study, we systematically investigate the structure-property relationship of atomic-layer-deposited titanium dioxide (TiO₂) to identify governing factors that determines the negative thermo-optic property of TiO₂. In addition, we demonstrate the negatively enhanced thermo-optic coefficient (TOC) values (from −1.8 to −2.3 × 10^-4 /°C) from the visible to the near-infrared regime via mild-thermal budget processing. Structural characterizations based on X-ray diffraction and reflectivity and temperature-dependent refractive index measurements based on spectroscopic ellipsometry prove that the higher crystallinity of anatase TiO₂ leads to greater negative TOC values, ascribed to the higher film density and lower porosity compared to amorphous states. Based on the Prod'homme model and bandgap analysis, we also report that the negative TOC of TiO₂ is influenced more by the volume expansion than the polarizability.

Original language	English
Title of host publication	239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11
Editors	H. Jagannathan, P. Timans, K. Kakushima, E. P. Gusev, Z. Karim, D. Misra, Y. Obeng, S. De Gendt, F. Roozeboom
Publisher	IOP Publishing Ltd.
Pages	151-158
Number of pages	8
Edition	2
ISBN (Electronic)	9781607689140
DOIs	https://doi.org/10.1149/10202.0151ecst
State	Published - 2021
Event	239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Chicago, United States Duration: 30 May 2021 → 3 Jun 2021

Publication series

Name	ECS Transactions
Number	2
Volume	102
ISSN (Print)	1938-6737
ISSN (Electronic)	1938-5862

Conference

Conference	239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021
Country/Territory	United States
City	Chicago
Period	30/05/21 → 3/06/21

Access to Document

10.1149/10202.0151ecst

Cite this

Park, H., Jung, J., Liu, M., Lee, S., & Park, H. (2021). Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO₂ films. In H. Jagannathan, P. Timans, K. Kakushima, E. P. Gusev, Z. Karim, D. Misra, Y. Obeng, S. De Gendt, & F. Roozeboom (Eds.), 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11 (2 ed., pp. 151-158). (ECS Transactions; Vol. 102, No. 2). IOP Publishing Ltd.. https://doi.org/10.1149/10202.0151ecst

Park, Honghwi ; Jung, Jaedong ; Liu, Mingyuan et al. / Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO₂ films. 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11. editor / H. Jagannathan ; P. Timans ; K. Kakushima ; E. P. Gusev ; Z. Karim ; D. Misra ; Y. Obeng ; S. De Gendt ; F. Roozeboom. 2. ed. IOP Publishing Ltd., 2021. pp. 151-158 (ECS Transactions; 2).

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abstract = "In this study, we systematically investigate the structure-property relationship of atomic-layer-deposited titanium dioxide (TiO2) to identify governing factors that determines the negative thermo-optic property of TiO2. In addition, we demonstrate the negatively enhanced thermo-optic coefficient (TOC) values (from −1.8 to −2.3 × 10-4 /°C) from the visible to the near-infrared regime via mild-thermal budget processing. Structural characterizations based on X-ray diffraction and reflectivity and temperature-dependent refractive index measurements based on spectroscopic ellipsometry prove that the higher crystallinity of anatase TiO2 leads to greater negative TOC values, ascribed to the higher film density and lower porosity compared to amorphous states. Based on the Prod'homme model and bandgap analysis, we also report that the negative TOC of TiO2 is influenced more by the volume expansion than the polarizability.",

author = "Honghwi Park and Jaedong Jung and Mingyuan Liu and Sunghwan Lee and Hongsik Park",

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Park, H, Jung, J, Liu, M, Lee, S & Park, H 2021, Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO₂ films. in H Jagannathan, P Timans, K Kakushima, EP Gusev, Z Karim, D Misra, Y Obeng, S De Gendt & F Roozeboom (eds), 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11. 2 edn, ECS Transactions, no. 2, vol. 102, IOP Publishing Ltd., pp. 151-158, 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021, Chicago, United States, 30/05/21. https://doi.org/10.1149/10202.0151ecst

Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO₂ films. / Park, Honghwi; Jung, Jaedong; Liu, Mingyuan et al.
239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11. ed. / H. Jagannathan; P. Timans; K. Kakushima; E. P. Gusev; Z. Karim; D. Misra; Y. Obeng; S. De Gendt; F. Roozeboom. 2. ed. IOP Publishing Ltd., 2021. p. 151-158 (ECS Transactions; Vol. 102, No. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO2 films

AU - Park, Honghwi

AU - Jung, Jaedong

AU - Liu, Mingyuan

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AU - Park, Hongsik

N1 - Publisher Copyright: © The Electrochemical Society

PY - 2021

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N2 - In this study, we systematically investigate the structure-property relationship of atomic-layer-deposited titanium dioxide (TiO2) to identify governing factors that determines the negative thermo-optic property of TiO2. In addition, we demonstrate the negatively enhanced thermo-optic coefficient (TOC) values (from −1.8 to −2.3 × 10-4 /°C) from the visible to the near-infrared regime via mild-thermal budget processing. Structural characterizations based on X-ray diffraction and reflectivity and temperature-dependent refractive index measurements based on spectroscopic ellipsometry prove that the higher crystallinity of anatase TiO2 leads to greater negative TOC values, ascribed to the higher film density and lower porosity compared to amorphous states. Based on the Prod'homme model and bandgap analysis, we also report that the negative TOC of TiO2 is influenced more by the volume expansion than the polarizability.

AB - In this study, we systematically investigate the structure-property relationship of atomic-layer-deposited titanium dioxide (TiO2) to identify governing factors that determines the negative thermo-optic property of TiO2. In addition, we demonstrate the negatively enhanced thermo-optic coefficient (TOC) values (from −1.8 to −2.3 × 10-4 /°C) from the visible to the near-infrared regime via mild-thermal budget processing. Structural characterizations based on X-ray diffraction and reflectivity and temperature-dependent refractive index measurements based on spectroscopic ellipsometry prove that the higher crystallinity of anatase TiO2 leads to greater negative TOC values, ascribed to the higher film density and lower porosity compared to amorphous states. Based on the Prod'homme model and bandgap analysis, we also report that the negative TOC of TiO2 is influenced more by the volume expansion than the polarizability.

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PB - IOP Publishing Ltd.

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Park H, Jung J, Liu M, Lee S, Park H. Influence of amorphous-to-crystalline transformation on the negative thermo-optic properties of TiO₂ films. In Jagannathan H, Timans P, Kakushima K, Gusev EP, Karim Z, Misra D, Obeng Y, De Gendt S, Roozeboom F, editors, 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11. 2 ed. IOP Publishing Ltd. 2021. p. 151-158. (ECS Transactions; 2). doi: 10.1149/10202.0151ecst