Influence on Deformed Shape of Electrostatic Deformable Mirror by the Geometry of Electrode

Saekwang Nam; Suntak Park; Sungryul Yun; Bongje Park; Seung Koo Park; Ki Uk Kyung

Influence on Deformed Shape of Electrostatic Deformable Mirror by the Geometry of Electrode

Saekwang Nam, Suntak Park, Sungryul Yun, Bongje Park, Seung Koo Park, Ki Uk Kyung

Department of Data Science

Electronics and Telecommunications Research Institute

Research output: Contribution to journal › Conference article › peer-review

Abstract

In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.

Original language	English
Article number	JTh2A.7
Journal	Optics InfoBase Conference Papers
State	Published - 2016
Event	CLEO: Applications and Technology, CLEO AT 2016 - San Jose, United States Duration: 5 Jun 2016 → 10 Jun 2016

Cite this

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title = "Influence on Deformed Shape of Electrostatic Deformable Mirror by the Geometry of Electrode",

abstract = "In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.",

author = "Saekwang Nam and Suntak Park and Sungryul Yun and Bongje Park and Park, {Seung Koo} and Kyung, {Ki Uk}",

note = "Publisher Copyright: {\textcopyright} OSA 2016.; CLEO: Applications and Technology, CLEO AT 2016 ; Conference date: 05-06-2016 Through 10-06-2016",

year = "2016",

language = "English",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

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TY - JOUR

T1 - Influence on Deformed Shape of Electrostatic Deformable Mirror by the Geometry of Electrode

AU - Nam, Saekwang

AU - Park, Suntak

AU - Yun, Sungryul

AU - Park, Bongje

AU - Park, Seung Koo

AU - Kyung, Ki Uk

N1 - Publisher Copyright: © OSA 2016.

PY - 2016

Y1 - 2016

N2 - In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.

AB - In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.

UR - http://www.scopus.com/inward/record.url?scp=85136415787&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:85136415787

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - JTh2A.7

T2 - CLEO: Applications and Technology, CLEO AT 2016

Y2 - 5 June 2016 through 10 June 2016

ER -

Influence on Deformed Shape of Electrostatic Deformable Mirror by the Geometry of Electrode

Abstract

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