@inproceedings{bbac8ab5da104c8883aea7a7e500bc19,
title = "Influence on deformed shape of electrostatic deformable mirror by the geometry of electrode",
abstract = "In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.",
author = "Saekwang Nam and Suntak Park and Sungryul Yun and Bongje Park and Park, {Seung Koo} and Kyung, {Ki Uk}",
note = "Publisher Copyright: {\textcopyright} 2016 OSA.; 2016 Conference on Lasers and Electro-Optics, CLEO 2016 ; Conference date: 05-06-2016 Through 10-06-2016",
year = "2016",
month = dec,
day = "16",
doi = "10.1364/cleo_at.2016.jth2a.7",
language = "English",
series = "2016 Conference on Lasers and Electro-Optics, CLEO 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 Conference on Lasers and Electro-Optics, CLEO 2016",
address = "United States",
}