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Influence on Deformed Shape of Electrostatic Deformable Mirror by the Geometry of Electrode

  • Saekwang Nam
  • , Suntak Park
  • , Sungryul Yun
  • , Bongje Park
  • , Seung Koo Park
  • , Ki Uk Kyung
  • Electronics and Telecommunications Research Institute

Research output: Contribution to journal › Conference article › peer-review

Abstract

In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.

Original languageEnglish
Article numberJTh2A.7
JournalOptics InfoBase Conference Papers
StatePublished - 2016
EventCLEO: Applications and Technology, CLEO AT 2016 - San Jose, United States
Duration: 5 Jun 2016 → 10 Jun 2016

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