Abstract
We have proposed an InGaAs-based gate-all-around (GAA) tunneling field-effect transistor (TFET) with a stacked dual-metal gate (DMG). The electrical performances of the proposed TFET are evaluated through technology computer-aided design (TCAD) simulations. The simulation results show that the proposed TFET demonstrates improved DC performances including high on-state current (Ion) and steep subthreshold swing (S), in comparison with a single-metal gate (SMG) TFET with higher gate metal workfunction, as it has a thinner source-channel tunneling barrier width by low workfunction of source-side channel gate. The effects of the gate workfunction on Ion, the off-state current (Ioff), and S in the DMG-TFETs are examined. The DMG-TFETs with PNPN structure demonstrate outstanding DC performances and RF characteristics with a higher n-type doping concentration in the In0.8Ga0.2As source-side channel region.
Original language | English |
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Pages (from-to) | 230-238 |
Number of pages | 9 |
Journal | Journal of Semiconductor Technology and Science |
Volume | 17 |
Issue number | 2 |
DOIs | |
State | Published - Apr 2017 |
Keywords
- Band-to-band tunneling (BTBT)
- Dual-metal gate
- InGaAs
- PNPN
- Tunneling field-effect transistors (TFETs)