Large-area dual-scale metal transfer by adhesive force

Moon Kyu Kwak, Pilnam Kim, Jae Kwan Kim, Chan Ick Park, Hye Sung Cho, Kahp Y. Suh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We report a large-area, dual-scale metal transfer method by using a difference in adhesive force. Rigiflex polyurethane acrylate (PUA) molds with engraved nanoscale patterns were used to transfer metal layers (Au or Al) to flexible polyethylene terephthalate (PET) substrate. Transfer process was performed sequentially for the metal layers on ridge and valley regions of the mold, resulting in a dual-scale metal transfer from a single master. A simple metal wire grid polarizer was fabricated and analyzed using this method.

Original languageEnglish
Title of host publicationNanoengineering
Subtitle of host publicationFabrication, Properties, Optics, and Devices V
DOIs
StatePublished - 2008
EventNanoengineering: Fabrication, Properties, Optics, and Devices V - San Diego, CA, United States
Duration: 13 Aug 200814 Aug 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7039
ISSN (Print)0277-786X

Conference

ConferenceNanoengineering: Fabrication, Properties, Optics, and Devices V
Country/TerritoryUnited States
CitySan Diego, CA
Period13/08/0814/08/08

Keywords

  • Adhesive force
  • Direct metal transfer
  • Dual scale transfer
  • Nano scale metal transfer
  • Work of adhesionwire grid polarizer

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