Lateral field emitter arrays with high emission currents and wide operation region by high field activation

Jae Hoon Lee, Myoung Bok Lee, Sung Ho Hahm, Jung Hee Lee, Hwa Il Seo, Dae Hyuk Kwon, Jin Sup Kim, Kyu Man Choi

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Lateral type field emitter arrays were fabricated. The sharpness of both cathode and gate tips and the gap between them were controlled by the LOCOS process. With changing gate bias, the emission current showed three different I-V characteristics.

Original languageEnglish
Pages (from-to)506-510
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number1 SPEC.
DOIs
StatePublished - Jan 2003

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