Low-temperature in situ cleaning of silicon (100) surface by electron cyclotron resonance hydrogen plasma
- Heung Sik Tae
- , Sang June Park
- , Seok Hee Hwang
- , Ki Hyun Hwang
- , Euijoon Yoon
- , Ki Woong Whang
- , Se Ahn Song
Research output: Contribution to journal › Article › peer-review
36
Scopus
citations