Low-temperature in situ cleaning of silicon (100) surface by electron cyclotron resonance hydrogen plasma

Heung Sik Tae, Sang June Park, Seok Hee Hwang, Ki Hyun Hwang, Euijoon Yoon, Ki Woong Whang, Se Ahn Song

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

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Physics