Low-temperature silicon homoepitaxy by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition

  • Heung Sik Tae
  • , Seok Hee Hwang
  • , Sang June Park
  • , Euijoon Yoon
  • , Ki Woong Whang

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

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