Fingerprint
Dive into the research topics of 'Low-temperature silicon homoepitaxy by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Low-temperature silicon homoepitaxy by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition
Heung Sik Tae, Seok Hee Hwang, Sang June Park, Euijoon Yoon, Ki Woong Whang
Research output: Contribution to journal › Article › peer-review
36
Scopus
citations