Abstract
We develop a backside illuminated photo-sensor that is fabricated on a <100>-oriented, high resistivity n-type 400 μm thick silicon wafer. The PIN photodiode is designed and manufactured as a radiation detector for alpha particles and low energy gamma-rays. The silicon photo-sensor is susceptible to radiation damage. Therefore, it is important to investigate the effects of radiation damage to the fabricated PIN photodiode. We measure the radiation damage to a PIN photodiode by a 35 MeV proton beam at the Korea Institute of Radiological and Medical Sciences (KIRAMS). We present the effects of proton radiation on the electrical properties of the PIN photodiode.
| Original language | English |
|---|---|
| Pages (from-to) | 692-694 |
| Number of pages | 3 |
| Journal | Journal of the Korean Physical Society |
| Volume | 59 |
| Issue number | 22 |
| DOIs | |
| State | Published - 12 Aug 2011 |
Keywords
- KIRAMS
- PIN photodiode
- Photo-sensor
- Proton beam
- Radiation damage