MEMS based flexible micro-supercapacitor as miniature high-power component

Swati J. Patii; Jongsung Park; Dong Weon Lee

doi:10.1109/MEMSYS.2018.8346518

MEMS based flexible micro-supercapacitor as miniature high-power component

Swati J. Patii
, Jongsung Park
, Dong Weon Lee

Department of Precision Mechanical Engineering

Chonnam National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

Herein, a flexible micro-supercapacitor as a power component developed by compatible standard clean room micro-fabrication processes and then microelectrode decorated with nanomaterial by forming the thin layer. These nanostructures based NiCo₂O₄@polypyrrole//MEMS micro-supercapacitor (MSc) achieves an areal capacitance of 2.12 mF cm^-2 at a scan rate of 2 mV s^-1. The fabricated single MSc device can deliver the highest energy and power density of 0.14 mWh cm^-2 and 120 mW cm^-2, respectively. Furthermore, the power performance tests of the fabricated flexible MSc in series and parallel connections exhibit a good understanding of the commercial capacitor. Finally, the fabricated MSc has demonstrated its practical application with different bendable angles.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	198-201
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346518
State	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

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10.1109/MEMSYS.2018.8346518

Cite this

Patii, S. J., Park, J., & Lee, D. W. (2018). MEMS based flexible micro-supercapacitor as miniature high-power component. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 198-201). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346518

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title = "MEMS based flexible micro-supercapacitor as miniature high-power component",

abstract = "Herein, a flexible micro-supercapacitor as a power component developed by compatible standard clean room micro-fabrication processes and then microelectrode decorated with nanomaterial by forming the thin layer. These nanostructures based NiCo2O4@polypyrrole//MEMS micro-supercapacitor (MSc) achieves an areal capacitance of 2.12 mF cm-2 at a scan rate of 2 mV s-1. The fabricated single MSc device can deliver the highest energy and power density of 0.14 mWh cm-2 and 120 mW cm-2, respectively. Furthermore, the power performance tests of the fabricated flexible MSc in series and parallel connections exhibit a good understanding of the commercial capacitor. Finally, the fabricated MSc has demonstrated its practical application with different bendable angles.",

author = "Patii, \{Swati J.\} and Jongsung Park and Lee, \{Dong Weon\}",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

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doi = "10.1109/MEMSYS.2018.8346518",

language = "English",

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Patii, SJ, Park, J & Lee, DW 2018, MEMS based flexible micro-supercapacitor as miniature high-power component. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 198-201, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346518

MEMS based flexible micro-supercapacitor as miniature high-power component. / Patii, Swati J.; Park, Jongsung; Lee, Dong Weon.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 198-201 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - Herein, a flexible micro-supercapacitor as a power component developed by compatible standard clean room micro-fabrication processes and then microelectrode decorated with nanomaterial by forming the thin layer. These nanostructures based NiCo2O4@polypyrrole//MEMS micro-supercapacitor (MSc) achieves an areal capacitance of 2.12 mF cm-2 at a scan rate of 2 mV s-1. The fabricated single MSc device can deliver the highest energy and power density of 0.14 mWh cm-2 and 120 mW cm-2, respectively. Furthermore, the power performance tests of the fabricated flexible MSc in series and parallel connections exhibit a good understanding of the commercial capacitor. Finally, the fabricated MSc has demonstrated its practical application with different bendable angles.

AB - Herein, a flexible micro-supercapacitor as a power component developed by compatible standard clean room micro-fabrication processes and then microelectrode decorated with nanomaterial by forming the thin layer. These nanostructures based NiCo2O4@polypyrrole//MEMS micro-supercapacitor (MSc) achieves an areal capacitance of 2.12 mF cm-2 at a scan rate of 2 mV s-1. The fabricated single MSc device can deliver the highest energy and power density of 0.14 mWh cm-2 and 120 mW cm-2, respectively. Furthermore, the power performance tests of the fabricated flexible MSc in series and parallel connections exhibit a good understanding of the commercial capacitor. Finally, the fabricated MSc has demonstrated its practical application with different bendable angles.

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M3 - Conference contribution

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BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 21 January 2018 through 25 January 2018

ER -

MEMS based flexible micro-supercapacitor as miniature high-power component

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