@inproceedings{eeb9d5e08d0b46a18c3875aaa0d6cd37,
title = "Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation",
abstract = "This paper reports a micro-electro-mechanical (MEM) switch based on carbon nanotube (CNT) array-to-CNT array contact operating at high temperatures. The outstanding interfacial thermal stability of the CNT arrays allowed the successful operation of the switch at 300 °C, under which condition the solid-state transistors or metal-based MEM switches would not be functioning. Our device operated as an n-type MEM switch by forming an air gap based on the intended stiction induced by the wet processes and the recovery after the synthesis of CNTs. Additionally, we investigated the possible degradation in switching behavior and the change in contact resistance at various temperatures. The switch exhibits stable and repetitive operations over 1, 000 cycles at 300 °C under hot-switching conditions in nitrogen at atmospheric pressure without a significant change in the switching characteristics.",
keywords = "carbon nanotube, high-temperature operation, logic circuit, Mechanical switch",
author = "Eunhwan Jo and Yunsung Kang and Sangjun Sim and Jungwook Choi and Jongbaeg Kim",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",
year = "2020",
month = jan,
doi = "10.1109/MEMS46641.2020.9056285",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "574--577",
booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",
address = "United States",
}