Micromechanical testing of SU-8 cantilevers

M. Hopcroft; T. Kramer; G. Kim; K. Takashima; Y. Higo; D. Moore; Juergen Brugger

doi:10.1111/j.1460-2695.2005.00873.x

Micromechanical testing of SU-8 cantilevers

M. Hopcroft
, T. Kramer
, G. Kim
, K. Takashima
, Y. Higo
, D. Moore
, Juergen Brugger

University of Cambridge
Swiss Federal Institute of Technology Lausanne
Institute of Science Tokyo

Research output: Contribution to journal › Article › peer-review

100 Scopus citations

Abstract

SU-8 is a photoplastic polymer with a wide range possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

Original language	English
Pages (from-to)	735-742
Number of pages	8
Journal	Fatigue and Fracture of Engineering Materials and Structures
Volume	28
Issue number	8
DOIs	https://doi.org/10.1111/j.1460-2695.2005.00873.x
State	Published - Aug 2005

Keywords

AFM cantilevers
Microscale mechanical test
SU-8
Surface profliometer
Young's modulus

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10.1111/j.1460-2695.2005.00873.x

Cite this

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title = "Micromechanical testing of SU-8 cantilevers",

abstract = "SU-8 is a photoplastic polymer with a wide range possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.",

keywords = "AFM cantilevers, Microscale mechanical test, SU-8, Surface profliometer, Young's modulus",

author = "M. Hopcroft and T. Kramer and G. Kim and K. Takashima and Y. Higo and D. Moore and Juergen Brugger",

year = "2005",

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T1 - Micromechanical testing of SU-8 cantilevers

AU - Hopcroft, M.

AU - Kramer, T.

AU - Kim, G.

AU - Takashima, K.

AU - Higo, Y.

AU - Moore, D.

AU - Brugger, Juergen

PY - 2005/8

Y1 - 2005/8

N2 - SU-8 is a photoplastic polymer with a wide range possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

AB - SU-8 is a photoplastic polymer with a wide range possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

KW - AFM cantilevers

KW - Microscale mechanical test

KW - SU-8

KW - Surface profliometer

KW - Young's modulus

UR - https://www.scopus.com/pages/publications/22544473613

U2 - 10.1111/j.1460-2695.2005.00873.x

DO - 10.1111/j.1460-2695.2005.00873.x

M3 - Article

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SN - 8756-758X

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SP - 735

EP - 742

JO - Fatigue and Fracture of Engineering Materials and Structures

JF - Fatigue and Fracture of Engineering Materials and Structures

IS - 8

ER -

Micromechanical testing of SU-8 cantilevers

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Keywords

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