Abstract
A direct patterning for a barrier rib using the roll-imprinting process is getting more interests in display manufacturing fields. Master roll patterning is one of the important issues in the roll-imprinting process. In this study, a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process is studied. Because the roller surface was a cylindrical shape, the designed pattern was made by using a film mask. Special jigs and roll holder were designed and used for the photolithography on the roll substrate. The roll patterning results showed a feasibility of the proposed method for the photolithography on the roll's surface.
Original language | English |
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Pages (from-to) | 763-768 |
Number of pages | 6 |
Journal | International Journal of Precision Engineering and Manufacturing |
Volume | 12 |
Issue number | 5 |
DOIs | |
State | Published - Oct 2011 |
Keywords
- Micro patterning
- Photolithography
- Roll patterning