Micropatterning on roll surface using photolithography processes

Sang Lyoul Kim, Gyu Man Kim

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

A direct patterning for a barrier rib using the roll-imprinting process is getting more interests in display manufacturing fields. Master roll patterning is one of the important issues in the roll-imprinting process. In this study, a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process is studied. Because the roller surface was a cylindrical shape, the designed pattern was made by using a film mask. Special jigs and roll holder were designed and used for the photolithography on the roll substrate. The roll patterning results showed a feasibility of the proposed method for the photolithography on the roll's surface.

Original languageEnglish
Pages (from-to)763-768
Number of pages6
JournalInternational Journal of Precision Engineering and Manufacturing
Volume12
Issue number5
DOIs
StatePublished - Oct 2011

Keywords

  • Micro patterning
  • Photolithography
  • Roll patterning

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