Abstract
A direct patterning for a barrier rib using the roll-imprinting process is getting more interests in display manufacturing fields. Master roll patterning is one of the important issues in the roll-imprinting process. In this study, a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process is studied. Because the roller surface was a cylindrical shape, the designed pattern was made by using a film mask. Special jigs and roll holder were designed and used for the photolithography on the roll substrate. The roll patterning results showed a feasibility of the proposed method for the photolithography on the roll's surface.
| Original language | English |
|---|---|
| Pages (from-to) | 763-768 |
| Number of pages | 6 |
| Journal | International Journal of Precision Engineering and Manufacturing |
| Volume | 12 |
| Issue number | 5 |
| DOIs | |
| State | Published - Oct 2011 |
Keywords
- Micro patterning
- Photolithography
- Roll patterning