Abstract
5 at.% Mg doped CuCrO2 films with different preferential growth orientations were grown on different substrates, (0001) Al2O 3, (001) YSZ, (001) SrTiO3 and quartz, by pulsed laser deposition. Film growth was performed at 500, 650 and 700 °C under an oxygen pressure of 10 mTorr. The c-axis preferred orientation of the CuCrO2 films was observed on the (000l) Al2O3 and (100) YSZ substrate. On the other hand, the CuCrO2 films on (100) SrTiO 3 substrates were oriented perpendicular to (01-15). The growth direction of the CuCrO2 films on a quartz substrate was set randomly. The films on the (001) SrTiO3 and quartz substrates showed few changes in their microstructures and electrical properties despite the increase in growth temperatures. On the other hand, the electrical properties of (0001) CuCrO2 epitaxial films on (0001) Al2O3 and (001) YSZ changed significantly with increasing growth temperature, which led to a change in their microstructure. The correlation between the microstructure and electrical properties suggest that control of the preferential growth direction and their related microstructures is important for reducing the undesired grain boundary that affects the electrical properties of the CuCrO2 films.
Original language | English |
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Pages (from-to) | 579-583 |
Number of pages | 5 |
Journal | Journal of Nanoelectronics and Optoelectronics |
Volume | 8 |
Issue number | 6 |
DOIs | |
State | Published - Dec 2013 |
Keywords
- CuCrO
- Delafossite
- Electrical Characteristic
- Epitaxial
- Microstructure
- PLD