Mitigation of arsenic contamination on the back side of si wafer using SiO2 protection layer for III-V on si heterogeneous epitaxy

  • Sung Kyu Lim
  • , Do Kywn Kim
  • , Hae Chul Hwang
  • , Jin Su Kim
  • , Won Sang Park
  • , Young Dae Cho
  • , Chan Soo Shin
  • , Won Kyu Park
  • , Jung Hee Lee
  • , Dae Hyun Kim
  • , Hi Deok Lee

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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Engineering

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Pharmacology, Toxicology and Pharmaceutical Science