Molding and bonding of thin film parylene for flexible microfluidics

Jihye Kim, Jae Bem You, Sung Gap Im, Wonhee Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We developed a molding and bonding technique for parylene thin-film microfluidics using initiated chemical vapor deposition (iCVD) bonding for flexible microfluidics applications. Flexible microfluidic can be integrated with flexible electronics and provide new function with tunable 3D shape. Using fabricated flexible channel consisting of a-few-micrometers-thick parylene layers, we achieved a minimum bending radius as small as ∼150 μm without leakage or significant deformation. We formed tunable 3D curvature by rolling the channel around a needle to induce Dean flow mixing, by which we demonstrated that tunable microchannel shapes in 3D can provide a tunable functionality (i.e., sample mixing) of microfluidic device.

Original languageEnglish
Title of host publicationMicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages1247-1249
Number of pages3
ISBN (Electronic)9780979806483
StatePublished - 2015
Event19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015 - Gyeongju, Korea, Republic of
Duration: 25 Oct 201529 Oct 2015

Publication series

NameMicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Conference

Conference19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015
Country/TerritoryKorea, Republic of
CityGyeongju
Period25/10/1529/10/15

Keywords

  • Flexible microfluidics
  • ICVD
  • Parylene microfluidics

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