TY - GEN
T1 - Molding and bonding of thin film parylene for flexible microfluidics
AU - Kim, Jihye
AU - You, Jae Bem
AU - Im, Sung Gap
AU - Lee, Wonhee
N1 - Publisher Copyright:
© 15CBMS-0001.
PY - 2015
Y1 - 2015
N2 - We developed a molding and bonding technique for parylene thin-film microfluidics using initiated chemical vapor deposition (iCVD) bonding for flexible microfluidics applications. Flexible microfluidic can be integrated with flexible electronics and provide new function with tunable 3D shape. Using fabricated flexible channel consisting of a-few-micrometers-thick parylene layers, we achieved a minimum bending radius as small as ∼150 μm without leakage or significant deformation. We formed tunable 3D curvature by rolling the channel around a needle to induce Dean flow mixing, by which we demonstrated that tunable microchannel shapes in 3D can provide a tunable functionality (i.e., sample mixing) of microfluidic device.
AB - We developed a molding and bonding technique for parylene thin-film microfluidics using initiated chemical vapor deposition (iCVD) bonding for flexible microfluidics applications. Flexible microfluidic can be integrated with flexible electronics and provide new function with tunable 3D shape. Using fabricated flexible channel consisting of a-few-micrometers-thick parylene layers, we achieved a minimum bending radius as small as ∼150 μm without leakage or significant deformation. We formed tunable 3D curvature by rolling the channel around a needle to induce Dean flow mixing, by which we demonstrated that tunable microchannel shapes in 3D can provide a tunable functionality (i.e., sample mixing) of microfluidic device.
KW - Flexible microfluidics
KW - ICVD
KW - Parylene microfluidics
UR - http://www.scopus.com/inward/record.url?scp=84983350783&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84983350783
T3 - MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
SP - 1247
EP - 1249
BT - MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PB - Chemical and Biological Microsystems Society
T2 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015
Y2 - 25 October 2015 through 29 October 2015
ER -