@inproceedings{9fedf308ffbe46efa0a86b2cfa1b66f0,
title = "Molding and bonding of thin film parylene for flexible microfluidics",
abstract = "We developed a molding and bonding technique for parylene thin-film microfluidics using initiated chemical vapor deposition (iCVD) bonding for flexible microfluidics applications. Flexible microfluidic can be integrated with flexible electronics and provide new function with tunable 3D shape. Using fabricated flexible channel consisting of a-few-micrometers-thick parylene layers, we achieved a minimum bending radius as small as ∼150 μm without leakage or significant deformation. We formed tunable 3D curvature by rolling the channel around a needle to induce Dean flow mixing, by which we demonstrated that tunable microchannel shapes in 3D can provide a tunable functionality (i.e., sample mixing) of microfluidic device.",
keywords = "Flexible microfluidics, ICVD, Parylene microfluidics",
author = "Jihye Kim and You, \{Jae Bem\} and Im, \{Sung Gap\} and Wonhee Lee",
note = "Publisher Copyright: {\textcopyright} 15CBMS-0001.; 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015 ; Conference date: 25-10-2015 Through 29-10-2015",
year = "2015",
language = "English",
series = "MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Chemical and Biological Microsystems Society",
pages = "1247--1249",
booktitle = "MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
}