Abstract
We demonstrate an electrically pumped all-monolithic 1.55-μm multiple-wavelength vertical-cavity surface-emitting laser array with the channel spacing of 1.2 nm. Binary-coded 3-step selective wet etching of InAlGaAs/InP intra-cavity superlattice is used for the precise wavelength adjustment prior to the growth of top distributed Bragg reflector. All the devices in the array show threshold currents between 2.0 and 2.5 mA under 10-%-duty pulse operation at room temperature.
Original language | English |
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Pages (from-to) | L304-L306 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 42 |
Issue number | 3 B |
DOIs | |
State | Published - 15 Mar 2003 |
Keywords
- InAlGaAs
- Laser array
- Metal-organic chemical vapor deposition (MOCVD)
- Monolithic
- Vertical-cavity surface-emitting laser (VCSEL)
- Wavelength division multiplexing (WDM)