Nanofabrication by shadow deposition through nanostencils

J. Brugger, G. Kim

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

2 Scopus citations

Original language	English
Title of host publication	Nanolithography and Patterning Techniques in Microelectronics
Publisher	Elsevier Ltd.
Pages	218-237
Number of pages	20
ISBN (Print)	9781855739314
DOIs	https://doi.org/10.1533/9781845690908.218
State	Published - Sep 2005

Access to Document

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