Nanofabrication by shadow deposition through nanostencils

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

2 Scopus citations

Original language	English
Title of host publication	Nanolithography and Patterning Techniques in Microelectronics
Publisher	Elsevier Ltd.
Pages	218-237
Number of pages	20
ISBN (Print)	9781855739314
DOIs	https://doi.org/10.1533/9781845690908.218
State	Published - Sep 2005

Access to Document

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title = "Nanofabrication by shadow deposition through nanostencils",

author = "J. Brugger and G. Kim",

year = "2005",

month = sep,

doi = "10.1533/9781845690908.218",

language = "English",

isbn = "9781855739314",

pages = "218--237",

booktitle = "Nanolithography and Patterning Techniques in Microelectronics",

publisher = "Elsevier Ltd.",

address = "United Kingdom",

}

TY - CHAP

T1 - Nanofabrication by shadow deposition through nanostencils

AU - Brugger, J.

AU - Kim, G.

PY - 2005/9

Y1 - 2005/9

UR - https://www.scopus.com/pages/publications/84902648290

U2 - 10.1533/9781845690908.218

DO - 10.1533/9781845690908.218

M3 - Chapter

AN - SCOPUS:84902648290

SN - 9781855739314

SP - 218

EP - 237

BT - Nanolithography and Patterning Techniques in Microelectronics

PB - Elsevier Ltd.

ER -