Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

G. M. Kim; S. Kawai; M. Nagashio; H. Kawakatsu; J. Brugger

doi:10.1116/1.1761240

Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

G. M. Kim, S. Kawai, M. Nagashio, H. Kawakatsu, J. Brugger

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Abstract

The fabrication of nanosuspended nanomechanical elements was investigated by using a direct nanopatterning method. It was observed that the nanomechanical structures resonated at a high natural frequency of up to 91 MHz. It was found that patterns ranging from sub-100 nm and >100 μm could be defined simultaneously in a single-step deposition. It was also found that these nanoelectromechanical system element structures could be fabricated without using photolithography.

Original language	English
Pages (from-to)	1658-1661
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	4
DOIs	https://doi.org/10.1116/1.1761240
State	Published - Jul 2004

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abstract = "The fabrication of nanosuspended nanomechanical elements was investigated by using a direct nanopatterning method. It was observed that the nanomechanical structures resonated at a high natural frequency of up to 91 MHz. It was found that patterns ranging from sub-100 nm and >100 μm could be defined simultaneously in a single-step deposition. It was also found that these nanoelectromechanical system element structures could be fabricated without using photolithography.",

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AU - Kawakatsu, H.

AU - Brugger, J.

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AB - The fabrication of nanosuspended nanomechanical elements was investigated by using a direct nanopatterning method. It was observed that the nanomechanical structures resonated at a high natural frequency of up to 91 MHz. It was found that patterns ranging from sub-100 nm and >100 μm could be defined simultaneously in a single-step deposition. It was also found that these nanoelectromechanical system element structures could be fabricated without using photolithography.

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Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

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