Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

The fabrication of nanosuspended nanomechanical elements was investigated by using a direct nanopatterning method. It was observed that the nanomechanical structures resonated at a high natural frequency of up to 91 MHz. It was found that patterns ranging from sub-100 nm and >100 μm could be defined simultaneously in a single-step deposition. It was also found that these nanoelectromechanical system element structures could be fabricated without using photolithography.