Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles

Yong Son; Junyeob Yeo; Hanul Moon; Tae Woo Lim; Sukjoon Hong; Koo Hyun Nam; Seunghyup Yoo; Costas P. Grigoropoulos; Dong Yol Yang; Seung Hwan Ko

doi:10.1002/adma.201100717

Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles

Yong Son
, Junyeob Yeo
, Hanul Moon
, Tae Woo Lim
, Sukjoon Hong
, Koo Hyun Nam
, Seunghyup Yoo
, Costas P. Grigoropoulos
, Dong Yol Yang
, Seung Hwan Ko

Korea Advanced Institute of Science and Technology
Ewha Womans University
University of California at Berkeley

Research output: Contribution to journal › Article › peer-review

197 Scopus citations

Abstract

A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.

Original language	English
Pages (from-to)	3176-3181
Number of pages	6
Journal	Advanced Materials
Volume	23
Issue number	28
DOIs	https://doi.org/10.1002/adma.201100717
State	Published - 26 Jul 2011

Keywords

femtosecond laser processing
maskless nanopatterning
metal deposition
metal patterning
organic field-effect transistors
silver nanocrystals

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10.1002/adma.201100717

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title = "Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles",

abstract = "A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.",

keywords = "femtosecond laser processing, maskless nanopatterning, metal deposition, metal patterning, organic field-effect transistors, silver nanocrystals",

author = "Yong Son and Junyeob Yeo and Hanul Moon and Lim, \{Tae Woo\} and Sukjoon Hong and Nam, \{Koo Hyun\} and Seunghyup Yoo and Grigoropoulos, \{Costas P.\} and Yang, \{Dong Yol\} and Ko, \{Seung Hwan\}",

year = "2011",

month = jul,

day = "26",

doi = "10.1002/adma.201100717",

language = "English",

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journal = "Advanced Materials",

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T1 - Nanoscale electronics

T2 - Digital fabrication by direct femtosecond laser processing of metal nanoparticles

AU - Son, Yong

AU - Yeo, Junyeob

AU - Moon, Hanul

AU - Lim, Tae Woo

AU - Hong, Sukjoon

AU - Nam, Koo Hyun

AU - Yoo, Seunghyup

AU - Grigoropoulos, Costas P.

AU - Yang, Dong Yol

AU - Ko, Seung Hwan

PY - 2011/7/26

Y1 - 2011/7/26

N2 - A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.

AB - A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.

KW - femtosecond laser processing

KW - maskless nanopatterning

KW - metal deposition

KW - metal patterning

KW - organic field-effect transistors

KW - silver nanocrystals

UR - https://www.scopus.com/pages/publications/79960527543

U2 - 10.1002/adma.201100717

DO - 10.1002/adma.201100717

M3 - Article

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AN - SCOPUS:79960527543

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SP - 3176

EP - 3181

JO - Advanced Materials

JF - Advanced Materials

IS - 28

ER -

Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles

Abstract

Keywords

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