Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles

Yong Son; Junyeob Yeo; Hanul Moon; Tae Woo Lim; Sukjoon Hong; Koo Hyun Nam; Seunghyup Yoo; Costas P. Grigoropoulos; Dong Yol Yang; Seung Hwan Ko

doi:10.1002/adma.201100717

Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles

Yong Son, Junyeob Yeo, Hanul Moon, Tae Woo Lim, Sukjoon Hong, Koo Hyun Nam, Seunghyup Yoo, Costas P. Grigoropoulos, Dong Yol Yang, Seung Hwan Ko

Research output: Contribution to journal › Article › peer-review

193 Scopus citations

Abstract

A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.

Original language	English
Pages (from-to)	3176-3181
Number of pages	6
Journal	Advanced Materials
Volume	23
Issue number	28
DOIs	https://doi.org/10.1002/adma.201100717
State	Published - 26 Jul 2011

Keywords

femtosecond laser processing
maskless nanopatterning
metal deposition
metal patterning
organic field-effect transistors
silver nanocrystals

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10.1002/adma.201100717

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title = "Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles",

abstract = "A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.",

keywords = "femtosecond laser processing, maskless nanopatterning, metal deposition, metal patterning, organic field-effect transistors, silver nanocrystals",

author = "Yong Son and Junyeob Yeo and Hanul Moon and Lim, \{Tae Woo\} and Sukjoon Hong and Nam, \{Koo Hyun\} and Seunghyup Yoo and Grigoropoulos, \{Costas P.\} and Yang, \{Dong Yol\} and Ko, \{Seung Hwan\}",

year = "2011",

month = jul,

day = "26",

doi = "10.1002/adma.201100717",

language = "English",

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TY - JOUR

T1 - Nanoscale electronics

T2 - Digital fabrication by direct femtosecond laser processing of metal nanoparticles

AU - Son, Yong

AU - Yeo, Junyeob

AU - Moon, Hanul

AU - Lim, Tae Woo

AU - Hong, Sukjoon

AU - Nam, Koo Hyun

AU - Yoo, Seunghyup

AU - Grigoropoulos, Costas P.

AU - Yang, Dong Yol

AU - Ko, Seung Hwan

PY - 2011/7/26

Y1 - 2011/7/26

N2 - A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.

AB - A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.

KW - femtosecond laser processing

KW - maskless nanopatterning

KW - metal deposition

KW - metal patterning

KW - organic field-effect transistors

KW - silver nanocrystals

UR - https://www.scopus.com/pages/publications/79960527543

U2 - 10.1002/adma.201100717

DO - 10.1002/adma.201100717

M3 - Article

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SP - 3176

EP - 3181

JO - Advanced Materials

JF - Advanced Materials

IS - 28

ER -

Nanoscale electronics: Digital fabrication by direct femtosecond laser processing of metal nanoparticles

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Keywords

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