N+ shallow junction formation using plasma doping and rapid thermal annealing

Seong Ho Kong, Ho Jung, Jeong Eun Kim, Seung Woo Do, Jae Geun Oh, Sun Hwan Hwang, Jin Gu Lee, Ja Choon Ku, Jong Ho Lee, Yong Hyun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publication2007 International Semiconductor Device Research Symposium, ISDRS
DOIs
StatePublished - 2007
Event2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States
Duration: 12 Dec 200714 Dec 2007

Publication series

Name2007 International Semiconductor Device Research Symposium, ISDRS

Conference

Conference2007 International Semiconductor Device Research Symposium, ISDRS
Country/TerritoryUnited States
CityCollege Park, MD
Period12/12/0714/12/07

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