@inproceedings{0474f0d959de487c81e73caeadc0ec78,
title = "N+ shallow junction formation using plasma doping and rapid thermal annealing",
author = "Kong, {Seong Ho} and Ho Jung and Kim, {Jeong Eun} and Do, {Seung Woo} and Oh, {Jae Geun} and Hwang, {Sun Hwan} and Lee, {Jin Gu} and Ku, {Ja Choon} and Lee, {Jong Ho} and Lee, {Yong Hyun}",
year = "2007",
doi = "10.1109/ISDRS.2007.4422355",
language = "English",
isbn = "1424418917",
series = "2007 International Semiconductor Device Research Symposium, ISDRS",
booktitle = "2007 International Semiconductor Device Research Symposium, ISDRS",
note = "2007 International Semiconductor Device Research Symposium, ISDRS ; Conference date: 12-12-2007 Through 14-12-2007",
}