Abstract
A Schottky-type solar-blind photodetector was designed and fabricated by employing an unintentionally doped Al0.33Ga0.67N layer, grown on a sapphire substrate using metalorganic chemical vapor deposition. A low-temperature grown AlGaN interlayer was also inserted between the GaN and AlGaN active layer and was shown to play an important role in decreasing the thermal and lattice mismatch-induced crack effect in the active AlGaN layer. The Schottky-type photodetectors fabricated on the crack-free AlGaN layer exhibited excellent electrical characteristics and UV detecting properties. The Pt/AlGaN Schottky photodiode had a dark current of 509 nA/cm2 at -5 V, cut-off wavelength of 310 nm, and peak responsivity of 0.15 A/W at 280 nm. Also, the UV/visible extinction ratio was 1.5 × 104 in the band edge, which is one of the highest values for AlGaN photodetectors.
Original language | English |
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Pages (from-to) | 99-102 |
Number of pages | 4 |
Journal | Physica Status Solidi C: Conferences |
Issue number | 1 |
DOIs | |
State | Published - 1 Dec 2002 |
Event | 2nd International Workshop on Nitride Semiconductors, IWN 2002 - Aachen, Germany Duration: 22 Jul 2002 → 25 Jul 2002 |