@inproceedings{af20678f13994a399e07ea5dd9e997ca,
title = "Optical thin film inspection using parallel spectral domain optical coherence tomography",
abstract = "The conventional Fourier domain optical coherence tomography system requires single scanner for two dimensional cross-sectional image and two scanners for volumetric image. Parallel spectral domain optical coherence tomography has advantage of single scanner for volumetric image, while two dimensional cross-sectional images are obtained by parallel acquisition of illuminated line on sample using area camera. In this study, the industrial inspection of optical thin film on touch screen panels was demonstrated using parallel spectral domain optical coherence tomography. The cross-sectional and volumetric images were acquired to detect the internal inf layer defects in optical thin film which are difficult to observe using visual or machine vision based inspection methods. The results indicate the possible application of the proposed system in touch screen panels inspection for quality assurance of product at consumer end.",
keywords = "Industrial inspection, Line field, Liquid crystal display, Optical thin film, Parallel scanning, Spectral domain optical coherence tomography, Touch screen panel",
author = "Shirazi, {Muhammad Faizan} and Wijesinghe, {Ruchire Eranga} and Ravichandran, {Naresh Kumar} and Pilun Kim and Mansik Jeon and Jeehyun Kim",
note = "Publisher Copyright: {\textcopyright} 2017 SPIE.; 25th International Conference on Optical Fiber Sensors, OFS 2017 ; Conference date: 24-04-2017 Through 28-04-2017",
year = "2017",
doi = "10.1117/12.2267395",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Libo Yuan and Youngjoo Chung and Wei Jin and Byoungho Lee and John Canning and Kentaro Nakamura",
booktitle = "25th International Conference on Optical Fiber Sensors",
address = "United States",
}