Origin of green luminescence in ZnO thin film grown by molecular-beam epitaxy

Y. W. Heo, D. P. Norton, S. J. Pearton

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Abstract

The properties of ZnO films grown by molecular-beam epitaxy are reported. The primary focus was on understanding the origin of deep-level luminescence. A shift in deep-level emission from green to yellow is observed with reduced Zn pressure during the growth. Photoluminescence and Hall measurements were employed to study correlations between deep-level/near-band-edge emission and carrier density. With these results, we suggest that the green emission is related to donor-deep acceptor (Zn vacancy VZn-) and the yellow to donor-deep acceptor (oxygen vacancy, Oi-).

Original languageEnglish
Article number073502
JournalJournal of Applied Physics
Volume98
Issue number7
DOIs
StatePublished - 1 Oct 2005

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