Oscillation amplitude-controlled resonant accelerometer design using a reference tracking automatic gain control

In this paper, it is presented a novel approach for the self-sustained resonant accelerometer design, which takes advantages of an automatic gain control in achieving stabilized oscillation dynamics. Through the proposed system modeling and loop transformation, the feedback controller is designed to maintain uniform oscillation amplitude under dynamic input accelerations. The fabrication process for the mechanical structure is illustrated in brief. Computer simulation and experimental results show the feasibility of the proposed accelerometer design, which is applicable to a control grade inertial sense system.