Performance analysis of ultra-scaled InAs HEMTs

Neerav Kharche, Gerhard Klimeck, Dae Hyun Kim, Jesús A. Del Alamo, Mathieu Luisier

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

20 Scopus citations

Abstract

The scaling behavior of ultra-scaled InAs HEMTs is investigated using a 2-dimensional real-space effective mass ballistic quantum transport simulator. The simulation methodology is first benchmarked against experimental I d-Vgs data obtained from devices with gate lengths ranging from 30 to 50 nm, where a good quantitative match is obtained. It is then applied to optimize the logic performance of not-yetfabricated 20nm InAs HEMT. It is demonstrated that the best performance is achieved in thin InAs channel devices by reducing the insulator thickness to improve the gate control while increasing the gate work function to suppress the gate leakage.

Original languageEnglish
Title of host publication2009 International Electron Devices Meeting, IEDM 2009 - Technical Digest
Pages20.3.1-20.3.4
DOIs
StatePublished - 2009
Event2009 International Electron Devices Meeting, IEDM 2009 - Baltimore, MD, United States
Duration: 7 Dec 20099 Dec 2009

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Conference

Conference2009 International Electron Devices Meeting, IEDM 2009
Country/TerritoryUnited States
CityBaltimore, MD
Period7/12/099/12/09

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