Performance of integrated silicon infrared microspectrometers

Engineering

• Micro Machining 100%
• Operating Range 50%
• Thermocouple 50%
• Optical Systems 50%
• Silicon Wafer 50%
• Spectral Resolution 50%
• Optical Path 50%
• Microelectronics 50%
• Design Consideration 50%
• Crystalline Silicon 50%
• Readout Circuit 50%