Abstract
A novel nanofabrication methodology for continuous, scalable, and geometry-tunable lithography is developed, named photo-roll lithography (PRL), by integrating photolithography with rollable processing. As a flexible mask attached to a quartz cylinder containing a UV source rolls over a photoresistcoated substrate, PRL realizes continuous photolithographic fabrication of various micro/nanoscale patterns with geometry that is tunable by controlling mask-substrate motions.
Original language | English |
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Pages (from-to) | 6554-6561 |
Number of pages | 8 |
Journal | Advanced Materials |
Volume | 25 |
Issue number | 45 |
DOIs | |
State | Published - 3 Dec 2013 |
Keywords
- flexible electronics
- graphene
- light-emitting diodes
- nanomanufacturing
- photolithography
- roll-to-roll processes
- spectrum filters
- transparent conductors