Photolithography-based carbon nanotubes patterning for field emission displays

Young Rae Cho; Jin Ho Lee; Yoon Ho Song; Seung Youl Kang; Chi Sun Hwang; Moon Youn Jung; Do Hyung Kim; Sang Kyun Lee; Hyun Seok Uhm; Kyoung Ik Cho

doi:10.1016/S0921-5107(00)00565-1

Photolithography-based carbon nanotubes patterning for field emission displays

Young Rae Cho, Jin Ho Lee, Yoon Ho Song, Seung Youl Kang, Chi Sun Hwang, Moon Youn Jung, Do Hyung Kim, Sang Kyun Lee, Hyun Seok Uhm, Kyoung Ik Cho

Department of Physics

Electronics and Telecommunications Research Institute

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

Carbon nanotubes (CNTs) emitters were successfully patterned in small pixels (50×50 μm²) by using photolithography process on a hard metal electrode for field emission displays (FEDs) application. The CNTs particles in the patterned pixels were uniformly distributed on 2-inch diagonal substrates. The maximum diameter of CNTs particles could be controlled less than 20 μm. After patterning and heat treatment process below 300 °C, most of CNTs bundles on the cathode electrode were aligned perpendicular to the substrates. The threshold electric field of emission for patterned CNTs was about 4.2 V μm^-1 and the field enhancement factor derived from the Fowler-Nordheim plots of the electron emissions was about 100 000 in the high voltage region. This newly developed process can be applicable to field emitter arrays for high resolution FEDs.

Original language	English
Pages (from-to)	128-132
Number of pages	5
Journal	Materials Science and Engineering: B
Volume	79
Issue number	2
DOIs	https://doi.org/10.1016/S0921-5107(00)00565-1
State	Published - 22 Jan 2001

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title = "Photolithography-based carbon nanotubes patterning for field emission displays",

abstract = "Carbon nanotubes (CNTs) emitters were successfully patterned in small pixels (50×50 μm2) by using photolithography process on a hard metal electrode for field emission displays (FEDs) application. The CNTs particles in the patterned pixels were uniformly distributed on 2-inch diagonal substrates. The maximum diameter of CNTs particles could be controlled less than 20 μm. After patterning and heat treatment process below 300 °C, most of CNTs bundles on the cathode electrode were aligned perpendicular to the substrates. The threshold electric field of emission for patterned CNTs was about 4.2 V μm-1 and the field enhancement factor derived from the Fowler-Nordheim plots of the electron emissions was about 100 000 in the high voltage region. This newly developed process can be applicable to field emitter arrays for high resolution FEDs.",

author = "Cho, {Young Rae} and Lee, {Jin Ho} and Song, {Yoon Ho} and Kang, {Seung Youl} and Hwang, {Chi Sun} and Jung, {Moon Youn} and Kim, {Do Hyung} and Lee, {Sang Kyun} and Uhm, {Hyun Seok} and Cho, {Kyoung Ik}",

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T1 - Photolithography-based carbon nanotubes patterning for field emission displays

AU - Cho, Young Rae

AU - Lee, Jin Ho

AU - Song, Yoon Ho

AU - Kang, Seung Youl

AU - Hwang, Chi Sun

AU - Jung, Moon Youn

AU - Kim, Do Hyung

AU - Lee, Sang Kyun

AU - Uhm, Hyun Seok

AU - Cho, Kyoung Ik

PY - 2001/1/22

Y1 - 2001/1/22

N2 - Carbon nanotubes (CNTs) emitters were successfully patterned in small pixels (50×50 μm2) by using photolithography process on a hard metal electrode for field emission displays (FEDs) application. The CNTs particles in the patterned pixels were uniformly distributed on 2-inch diagonal substrates. The maximum diameter of CNTs particles could be controlled less than 20 μm. After patterning and heat treatment process below 300 °C, most of CNTs bundles on the cathode electrode were aligned perpendicular to the substrates. The threshold electric field of emission for patterned CNTs was about 4.2 V μm-1 and the field enhancement factor derived from the Fowler-Nordheim plots of the electron emissions was about 100 000 in the high voltage region. This newly developed process can be applicable to field emitter arrays for high resolution FEDs.

AB - Carbon nanotubes (CNTs) emitters were successfully patterned in small pixels (50×50 μm2) by using photolithography process on a hard metal electrode for field emission displays (FEDs) application. The CNTs particles in the patterned pixels were uniformly distributed on 2-inch diagonal substrates. The maximum diameter of CNTs particles could be controlled less than 20 μm. After patterning and heat treatment process below 300 °C, most of CNTs bundles on the cathode electrode were aligned perpendicular to the substrates. The threshold electric field of emission for patterned CNTs was about 4.2 V μm-1 and the field enhancement factor derived from the Fowler-Nordheim plots of the electron emissions was about 100 000 in the high voltage region. This newly developed process can be applicable to field emitter arrays for high resolution FEDs.

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JO - Materials Science and Engineering: B

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Photolithography-based carbon nanotubes patterning for field emission displays

Abstract

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