Piezoelectric BaTiO3 thin film nanogenerator on plastic substrates

Kwi Il Park; Sheng Xu; Ying Liu; Geon Tae Hwang; Suk Joong L. Kang; Zhong Lin Wang; Keon Jae Lee

doi:10.1021/nl102959k

Piezoelectric BaTiO₃ thin film nanogenerator on plastic substrates

Kwi Il Park
, Sheng Xu
, Ying Liu
, Geon Tae Hwang
, Suk Joong L. Kang
, Zhong Lin Wang
, Keon Jae Lee

Georgia Institute of Technology
Korea Advanced Institute of Science and Technology

Research output: Contribution to journal › Article › peer-review

808 Scopus citations

Abstract

The piezoelectric generation of perovskite BaTiO₃ thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO₃ thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO ₂/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal-insulator (BaTiO₃)-metal-structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes. When periodically deformed by a bending stage, a flexible BaTiO₃ nanogenerator can generate an output voltage of up to 1.0 V. The fabricated nanogenerator produced an output current density of 0.19 μA/cm² and a power density of ∼7 mW/cm³. The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies.

Original language	English
Pages (from-to)	4939-4943
Number of pages	5
Journal	Nano Letters
Volume	10
Issue number	12
DOIs	https://doi.org/10.1021/nl102959k
State	Published - 8 Dec 2010

Keywords

BaTiO
energy harvesting
flexible electronics
nanogenerator
piezoelectric
thin film

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10.1021/nl102959k

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title = "Piezoelectric BaTiO3 thin film nanogenerator on plastic substrates",

abstract = "The piezoelectric generation of perovskite BaTiO3 thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO3 thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO 2/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal-insulator (BaTiO3)-metal-structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes. When periodically deformed by a bending stage, a flexible BaTiO3 nanogenerator can generate an output voltage of up to 1.0 V. The fabricated nanogenerator produced an output current density of 0.19 μA/cm2 and a power density of ∼7 mW/cm3. The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies.",

keywords = "BaTiO, energy harvesting, flexible electronics, nanogenerator, piezoelectric, thin film",

author = "Park, \{Kwi Il\} and Sheng Xu and Ying Liu and Hwang, \{Geon Tae\} and Kang, \{Suk Joong L.\} and Wang, \{Zhong Lin\} and Lee, \{Keon Jae\}",

year = "2010",

month = dec,

day = "8",

doi = "10.1021/nl102959k",

language = "English",

volume = "10",

pages = "4939--4943",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

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TY - JOUR

T1 - Piezoelectric BaTiO3 thin film nanogenerator on plastic substrates

AU - Park, Kwi Il

AU - Xu, Sheng

AU - Liu, Ying

AU - Hwang, Geon Tae

AU - Kang, Suk Joong L.

AU - Wang, Zhong Lin

AU - Lee, Keon Jae

PY - 2010/12/8

Y1 - 2010/12/8

N2 - The piezoelectric generation of perovskite BaTiO3 thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO3 thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO 2/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal-insulator (BaTiO3)-metal-structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes. When periodically deformed by a bending stage, a flexible BaTiO3 nanogenerator can generate an output voltage of up to 1.0 V. The fabricated nanogenerator produced an output current density of 0.19 μA/cm2 and a power density of ∼7 mW/cm3. The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies.

AB - The piezoelectric generation of perovskite BaTiO3 thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO3 thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO 2/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal-insulator (BaTiO3)-metal-structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes. When periodically deformed by a bending stage, a flexible BaTiO3 nanogenerator can generate an output voltage of up to 1.0 V. The fabricated nanogenerator produced an output current density of 0.19 μA/cm2 and a power density of ∼7 mW/cm3. The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies.

KW - BaTiO

KW - energy harvesting

KW - flexible electronics

KW - nanogenerator

KW - piezoelectric

KW - thin film

UR - https://www.scopus.com/pages/publications/78650130636

U2 - 10.1021/nl102959k

DO - 10.1021/nl102959k

M3 - Article

AN - SCOPUS:78650130636

SN - 1530-6984

VL - 10

SP - 4939

EP - 4943

JO - Nano Letters

JF - Nano Letters

IS - 12

ER -

Piezoelectric BaTiO₃ thin film nanogenerator on plastic substrates

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Keywords

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