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Piezoresistive accelerometer fabricated by selective formation and etching of porous silicon

  • Jun Hwan Sim
  • , Chan Seob Cho
  • , Jin Sup Kim
  • , Jung Hee Lee
  • , Jong Hyun Lee
  • Korea Maritime and Ocean University
  • Inje University
  • Kyungpook National University

Research output: Contribution to journalArticlepeer-review

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