Porous Si/SnO2 nanowires heterostructures for H2S gas sensing

  • Jae Hoon Bang
  • , Myung Sik Choi
  • , Ali Mirzaei
  • , Wansik Oum
  • , Seungmin Han
  • , Sang Sub Kim
  • , Hyoun Woo Kim

Research output: Contribution to journalArticlepeer-review

71 Scopus citations

Abstract

In this work, a low-temperature (100 °C) gas sensor based on heterojunctions of porous Si and SnO2 nanowires (NWs) is presented. Porous Si was obtained from p-Si wafers by electrochemical etching, and SnO2 NWs were fabricated by a vapor-liquid-solid route. Different characterization techniques were used to verify the formation of porous Si/SnO2 NW heterojunctions. H2S gas sensing results showed enhanced gas sensing performance of the porous Si/SnO2 NW sensor in comparison with that of a porous Si sensor. The reasons for such enhancement are discussed in detail. This study demonstrates the promising effects of SnO2 NWs in combination with porous Si to realize low-temperature H2S gas sensors that are highly compatible with existing Si processing technology.

Original languageEnglish
Pages (from-to)604-611
Number of pages8
JournalCeramics International
Volume46
Issue number1
DOIs
StatePublished - Jan 2020

Keywords

  • Gas sensor
  • HS gas
  • Porous Si
  • Sensing mechanism
  • SnO NWs

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