Properties and applications of RuO2/GaN and related Schottky contacts

Sung Ho Hahm, Yong Hyun Lee, Myoung Bok Lee, Jung Hee Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

RuO2/GaN and related materials were investigated as Schottky contacts in GaN-based photo-receiving and electronic devices. It was demonstrated that an RuO2 film forms a stable Schottky contact on a GaN layer with a barrier height (φB) of 0.93 eV and transmittance of 70% in the visible and near UV region. The RuO2/GaN Schottky diode showed a breakdown at over -50 V and leakage current of only 0.3 nA at -5 V. The RuO2/GaN Schottky-type photodetector also exhibited a UV/Visible rejection ratio of over 3×106 and responsivity of 0.23 A/W at 330 nm. The RuO2 gate AlGaN/GaN HFET exhibited a high drain current (Id)of 689.3 mA/mm and high transconductance (g)of 197.4 mS/mm. The cut-off frequency (f1) and maximum oscillation frequency (fmax) were 27.0 GHz and 45.5 GHz, respectively.

Original languageEnglish
Title of host publication2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings
EditorsHiroshi Iwai, Xin-Ping Qu, Bing-Zong Li, Guo-Ping Ru, Paul Yu
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1280-1285
Number of pages6
ISBN (Electronic)0780365208, 9780780365209
DOIs
StatePublished - 2001
Event6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Shanghai, China
Duration: 22 Oct 200125 Oct 2001

Publication series

Name2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings
Volume2

Conference

Conference6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001
Country/TerritoryChina
CityShanghai
Period22/10/0125/10/01

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