Abstract
We investigated the use of optical coherence tomography (OCT) to measure several materials immersed in optical adhesives. The effects of variations in the concentration, physical characteristics, and thickness of the materials were studied, and these parameters were found to significantly affect the OCT measurement. The materials were selected for their distinct spectral properties in the infrared region. To ensure reliability, we acquired images using a scanning electron microscope after performing the semiconductor production process. We verified the feasibility of the application of OCT for defect inspection and product verification of touch-screen panels.
Original language | English |
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Pages (from-to) | 50-57 |
Number of pages | 8 |
Journal | Optics and Lasers in Engineering |
Volume | 68 |
DOIs | |
State | Published - May 2015 |
Keywords
- Defect inspection
- Nondestructive optical inspection
- Optical coherence tomography
- Touch-screen panel