Recent advances in processing of ZnO

S. J. Pearton, D. P. Norton, K. Ip, Y. W. Heo, T. Steiner

Research output: Contribution to journal › Review article › peer-review

669 Scopus citations

Original language	English
Pages (from-to)	932-948
Number of pages	17
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	3
DOIs	https://doi.org/10.1116/1.1714985
State	Published - 2004

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title = "Recent advances in processing of ZnO",

author = "Pearton, {S. J.} and Norton, {D. P.} and K. Ip and Heo, {Y. W.} and T. Steiner",

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journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

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AU - Norton, D. P.

AU - Ip, K.

AU - Heo, Y. W.

AU - Steiner, T.

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