Recent advances in processing of ZnO

Research output: Contribution to journal › Review article › peer-review

684 Scopus citations

Original language	English
Pages (from-to)	932-948
Number of pages	17
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	3
DOIs	https://doi.org/10.1116/1.1714985
State	Published - 2004

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@article{b634094d51084a658e740a6a9d74ee5b,

title = "Recent advances in processing of ZnO",

author = "Pearton, \{S. J.\} and Norton, \{D. P.\} and K. Ip and Heo, \{Y. W.\} and T. Steiner",

year = "2004",

doi = "10.1116/1.1714985",

language = "English",

volume = "22",

pages = "932--948",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Recent advances in processing of ZnO

AU - Pearton, S. J.

AU - Norton, D. P.

AU - Ip, K.

AU - Heo, Y. W.

AU - Steiner, T.

PY - 2004

Y1 - 2004

UR - https://www.scopus.com/pages/publications/3242724267

U2 - 10.1116/1.1714985

DO - 10.1116/1.1714985

M3 - Review article

AN - SCOPUS:3242724267

SN - 1071-1023

VL - 22

SP - 932

EP - 948

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -