| Original language | Korean |
|---|---|
| Journal | Journal of the Korean Institute of Surface Engineering |
| State | Published - 2014 |
RF 마그네트론 스퍼터링법으로 상온 증착된 비정질 ITZO 산화물의 전기적 및 광학적 특성
Research output: Contribution to journal › Article › peer-review
Research output: Contribution to journal › Article › peer-review
| Original language | Korean |
|---|---|
| Journal | Journal of the Korean Institute of Surface Engineering |
| State | Published - 2014 |